This system is equipped with SHG lasers that cause little damage to the workpieces. Since most of the laser light is absorbed on the wafer surface, the circuits suffer little damage. It can handle wafers of 6, 8, and 12 inches in size (150, 200, and 300 mm).

The system's fully digital controlled galvo-scanners provide high precision marking. Its air-cooled laser markers (diode laser pumped type) make it easy to perform maintenance, resulting in lower running costs. We provide optional functions for auto focusing and vacuum-sucking glass stages to avoid warping the wafers.
We also offer a wide variety of options, such as Laser Power Feedback Control and ID reading.

• Fully air-cooled diode-pumped fiber-coupling SHG laser markers
• Handles wafers of 6, 8, and 12 inches (150, 200, and 300 mm)
• High-precision compensated marking
• High-quality black marking and white marking
• Options for measures to prevent wafer warping (vacuum-sucking glass stages; auto-focusing functions)

* Please contact a sales person for details.